Supercontinuum source

Fiber based "white-light" source

A supercontinuum source based on nonlinear spectral broadening in optical fibers, generates continuous power across a wide wavelength range for applications in semiconductor metrology, spectroscopy etc.

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Technology at a glance

Specifications

•Broad spectral range: 1.0-2.0 𝝻m.
•Tunable high repetitio rate: 20-80 kHz.
•Nanosecond pulse duration: ~60 ns.
•High average power: >2 W.
•High output stability: ~1 % noise (within 15 Hz) 

Architecture

All fiber architecture.
•Telecom fiber laser cost-effective solution.
Passive Q-switching operation.
•Nonlinearity-driven spectral shaping capability.

Semiconductor metrology

Already deployed

Non-contact temperature measurement of in-process silicon wafer

  • 1 °C measurement accuracy
  • Large measurement rage  up to 600 °C.
  • Fast acquisition speed (~ms)

Additional applications

Biomedical imaging

Tunable source

Application space

Research outputs

Contactless temperature measurement of an in-process silicon wafer using a spectrally shaped supercontinuum source

Filed Patent

“Method and system for temperature measurement of semiconductor wafer”. (Application No. 202541030568, filed March 2025)

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